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MLase Excimer Laser MLI series

Reference: MLA-MLI

The modern and compact MLI Excimer Laser series from MLase are UV light sources at 193 nm or 248 nm with high pulse energies up to 16 mJ and repetition rates up to 1,000 Hz !

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MLase Excimer Laser MLI series
The modern and compact MLI Excimer Laser series from MLase are UV light sources at 193 nm or 248 nm with high pulse energies up to 16 mJ and repetition rates up to 1,000 Hz !
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Alexandre Besson
Business Unit Director
+33 5 57 10 92 84
a.besson@laser2000.fr

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Product description

MLase Excimer Laser MLI series

Features:	Customer Benefits:
Rigid, industry grade design	? High reliability
Corona Preionization	? Homogeneous beam profile
Modern Solid State Pulsed Power Module	? Immediate availability, no aging
Tube Technology with higher gas capacity	? Tube all metal sealed for extended lifetimes
Energy Monitor	? Energy stabilizing
Compact Excimerlaser, Single Phase	? Easy to operate, easy to integrate

These compact stand-alone UV Lasers offer the best life times and reliability available on the market. With a homogeneous beam profile and energy stabilization, they are ideal for demanding applications. Simple connection via USB and control with the included software allow quick setup and easy Integration.

Customized OEM versions with individual features based on the standard products can also be offered. Integrators benefit from standardized interfaces and a strong local support team.

MLI models with the suffix "LC" also have the possibility of active water cooling (either via domestic water, or external heat exchanger, no DI water required) and thus allow a stable continuous operation at 100 % duty cycle.

Available wavelengths are 193 nm (gas: ArF - Argonflourid) and 248 nm (gas: KrF - Kryptonflourid). Other wavelengths are available on request.

Please consult Laser 2000 for support with planning and setting up an appropriate system for the supply of the laser gases.

System control is performed through a simple USB interface, RS232, or over a serial fiber optic connection. All changeable parameters (eg, repetition rate, pump voltage, etc.) and automatic gas exchange can be carried out using the software supplied.

Specifications:	ArF			KrF
Wavelength (nm)	193			248
Max. repetition rate (Hz)	200	500	1000	200	500	1000
Stabilized avg. power (W)	1,2	3,0	6,0	2,0	5,0	10
Stabilized Pulse Energy (mJ)	6			10
Energy Stability (sigma, %)	2
Beam Dimensions (FWHM, V x H mm)	6x3
Beam Divergence (FWHM, V x H mrad)	2x1
Pulse Duration (FWHM) (ns)	5-10

Weight / Utilites / Dimensions:	MLI	MLI-LC
Dimensons (L x B x H)	560 x 315 x 445 mm³	560 x 355 x 445 mm²
Weight	ca. 75 kg	ca. 80 kg
Cooling	forced air	water cooling
Power supply	230V, 50/60Hz, 2000W max.	230V, 50/60Hz, 2000W max.

Lifetime Data:	MLase	typical competitor Values
dynamic gas lifetime (stab. at 4 mJ)	50 100 MP	~ 20 MP
static (passive) gas lifetime	2 3 months	~ 1 2 weeks
resonator optics	>> 200 MP	~ 100 MP
resonator tube	> 4 GP	~ 1 GP

Ophthalmic applications at Laser 2000:

Download: Excimer Laser Precision Glass Marking

Excimer Laser applications:

Eye surgery methods (ophthalmology) by means of LASIK (laser in situ keratomileusis) and PRK (photorefractive keratectomy), in which the shape of the cornea is changed in favor of the optical properties. For this ArF lasers are used at 193 nm.
Visual inspection and metrology
Optics and micro-optics inspection
Laser patterning and scribing
Micromachining brittle materials, such as ceramic, metal, or plastic
Laser ablation / Pulsed laser deposition (ICP-MS)
Dermatology, e. g. treatment of psoriasis and vitiligo with XeCl-lasers at 308 nm
Immersion Lithography
Writing masks
Direct wafer processing

Links with further information about Excimer Lasers:

Our manufacturer MLase AG
Detailed description about the technology and applications for Excimer Lasers at RP-Photonics Encyclopedia
Detailed description about the technology and applications for Excimer Laser on Wikipedia